Silicon Semiconductor Technology - Processing and Integration of Microelectronic Devices
Ulrich Hilleringmann
This book has been used as a study script at German Universities and Universities for
Applied Sciences for almost 30 years. It was initially written in German for students in
their 3rd year. Still, it was also quickly used to educate apprentices for microtechnolo-
gies and qualifying employers in industrial integrated circuit facilities. Due to its success
in Germany, Austria, and Switzerland, the translation into the English language will now
enable a larger international audience.
The book’s content starts from basic knowledge of individual process steps in silicontechnology and extends to modern integration techniques for CMOS circuits. Own expe-
riences of the author give detailed information on the physical processes and chemical
reactions occurring during the processing of the silicon semiconductor. Besides the theo-
retical models, the processing equipment used is discussed in detail. It enables self-stud-
ies with some included exercises to provide a feeling of the complexity of semiconductor
technology.
The author thanks all persons who contributed to the success of this book, startingfrom the study script in 1992 until the 7. edition in 2018. There were more than 100
diploma-, bachelor- and master thesis, and about 20 PhD students involved in assembling
smaller or larger parts around silicon processing. Thank you all for your contributions.
Applied Sciences for almost 30 years. It was initially written in German for students in
their 3rd year. Still, it was also quickly used to educate apprentices for microtechnolo-
gies and qualifying employers in industrial integrated circuit facilities. Due to its success
in Germany, Austria, and Switzerland, the translation into the English language will now
enable a larger international audience.
The book’s content starts from basic knowledge of individual process steps in silicontechnology and extends to modern integration techniques for CMOS circuits. Own expe-
riences of the author give detailed information on the physical processes and chemical
reactions occurring during the processing of the silicon semiconductor. Besides the theo-
retical models, the processing equipment used is discussed in detail. It enables self-stud-
ies with some included exercises to provide a feeling of the complexity of semiconductor
technology.
The author thanks all persons who contributed to the success of this book, startingfrom the study script in 1992 until the 7. edition in 2018. There were more than 100
diploma-, bachelor- and master thesis, and about 20 PhD students involved in assembling
smaller or larger parts around silicon processing. Thank you all for your contributions.
年:
2023
語言:
english
頁數:
271
ISBN 10:
3658410418
ISBN 13:
9783658410414
文件:
PDF, 9.07 MB
IPFS:
,
english, 2023